Output quality | Ultra pure water conductivity ≤0.055μS/cm@25℃ resistivity≤18.3MΩ.cm@25℃corpuscular(bigger than 0.05μm) content: <1/ml, heat source : <0.001Eu/ml, microbe: < 1cfu/ml, total organic carbon TOC: < 5ppb,metal cation (unit: ppb): Fe <0.005, Cu <0.005, Al <0.005, Ni <0.005, Zn<0.02, Cr <0.005, Na <0.01, K <0.02, Anion (unit: ppb): C1- <0.01,NO2- <0.02,NO3- <0.02, SO42- <0.01, |