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CIF pilot & production plasma cleaners (CPC15...150)
CIF pilot & production plasma cleaners (CPC15...150)
Place of Origin:
China
Brand:
CIF
Model:
CPC15...CPC150
Price:
Hits:
Updated:
12/31/2025
  • Product Detail
  • Company Profile

    The CPC Series production plasma cleaners by CIF are specifically designed to cater to the needs of both R&D and industrial customers. With their versatile configurations and a vacuum chamber featuring a layered design, the CPC series plasma cleaning machines prove highly adaptable for various production scenarios. These state-of-the-art machines from CIF excel in plasma cleaning, activation, etching, and other applications while demonstrating exceptional stability, performance, repeatability, and uniformity even in challenging environments.

    Function & Features

    Intelligent control and humanized operation

    • Equipped with a 7 - inch color touch - screen, it supports both Chinese and English interfaces, facilitating intuitive interaction.
    • It is integrated with an internal PLC industrial control system, which supports both manual and automatic operation modes and enables full - process automated control.
    • It can store 20 groups of programmable recipes and supports the storage, output, and full - process traceability of process data, thereby achieving intelligent production management.

    Precision Craftsmanship and Gas Control System

    • Intelligent Vacuum Control: Enables precise vacuum regulation through two operational modes—adjustment of gas flow rate or chamber pressure-providing flexible and intelligent process control.
    • Precise Gas Injection: Uses mass flow controllers for precise delivery of process gases. The system comes standard with a dual-gas configuration, with optional multi-channel configurations available to support a wide range of process gases, including oxygen, argon, nitrogen, carbon tetrafluoride, and hydrogen.
    • Uniform Gas Injection Design: Features a multi-channel gas inlet structure that overcomes the uneven distribution of conventional single-channel designs, ensuring consistent and uniform processing effects.
    • Contamination Prevention: Integrated with HEPA high-efficiency particulate air filters, along with gas backfill and purge functionalities, to minimize the risk of secondary contamination and maintain a clean processing environment.

    Reliable Structure and Wide Adaptability

    • The vacuum chamber and pipeline system are made of 316 stainless steel, ensuring cleanliness, corrosion resistance, and process purity.
    • The design is compact and space-efficient.
    • It handles samples of various materials, shapes, and sizes, offering broad applicability.
    • The sample processing is conducted at low temperatures to prevent thermal damage and oxidation.

    Stable, efficient, economical and energy-saving

    • High processing efficiency and consistent repeatability ensure stable mass production.
    • The machine operates stably with low operating costs, minimal maintenance, and less wear.

    Comprehensive safety protection

    • Features multiple safety mechanisms: automatic power cutoff when the cabin door opens, plus controllable pressure relief and other functions.
    • It has a run/stop indicator to ensure operational safety for personnel and samples.

    Technical Specification

    Model

    CPC10

    CPC15

    CPC27.5

    CPC35

    Chamber Size

    w: 180mm

    h: 180mm

    d: 330mm

    w: 240mm

    h: 240mm

    d: 260mm

    w: 250mm

    h: 250mm

    d: 440mm

    w: 320mm

    h: 320mm

    d: 350mm

    Chamber Volume

    10.7L

    15L

    27.5L

    35L

    Chamber Material

    stainless steel

    stainless steel

    stainless steel

    stainless steel

    Working Area, mm

    W180xD280

    W240xD210

    W250xD390

    W320xD300

    Electrodes layout

    2 layers

    2 layers

    2 layers

    3-4 layers

    RF Frequency

    13.56MHz

    13.56MHz

    13.56MHz

    13.56MHz

    RF Power

    10-300W

    10-300W

    10-300W

    10-300W

    Matcher

    Automatic

    Automatic

    Automatic

    Automatic

    Plasma Excitation

    Capacitive

    Capacitive

    Capacitive

    Capacitive

    Current

    1.2A

    1.2A

    1.2A

    1.2A

    Time Setting

    9999 sec

    9999 sec

    9999 sec

    9999 sec

    Gas Stable Time

    1 min

    1 min

    1 min

    1 min

    Vacuum Degree

    Less than 100pa

    Less than 100pa

    Less than 100pa

    Less than 100pa

    Control System

    7 "PLC touch screen controller

    7 "PLC touch screen controller

    7 "PLC touch screen controller

    7 "PLC touch screen controller

    Process Gas

    2 MFC

    2 MFC

    2 MFC

    2 MFC

    Product Size, mm

    L610xW550 xH465

    L670xW550

    xH525

    L850xW560 xH535

    L625xW600

    xH805

    Packing Size, mm

    L730xW700 xH720

    L790xW775

    xH780

    L970xW785 xH790

    L740xW775

    xH1045

    Pumping speed

    ~8m³/h

    ~8m³/h

    ~16m³/h

    ~16m³/h

    Power Supply

    AC220V 50/60Hz 475W

    AC220V 50/60Hz 475W

    AC220V 50/60Hz 475W

    AC220V 50/60Hz 475W

    Net Weight

    104kg

    109kg

    120kg

    135kg

     

    Model

    CPC 60

    CPC80

    CPC120

    CPC150

    Chamber Size

    w: 320mm

    h: 320mm

    d: 585mm

    w: 420mm

    h: 420mm

    d: 500mm

    w: 500mm

    h: 500mm

    d: 450mm

    w: 500mm

    h: 500mm

    d: 600mm

    Chamber Volume

    60L

    80L

    120L

    150L

    Chamber Material

    stainless steel

    stainless steel

    stainless steel

    stainless steel

    Working Area, mm

    W320xD535

    W420xD450

    W500xD400

    W500xD550

    Electrodes layout

    3-4 layers

    6 layers

    8-10 layers

    10-15 layers

    RF Frequency

    13.56MHz

    13.56MHz

    13.56MHz

    13.56MHz

    RF Power

    10-600W

    10-600W

    10-1000W

    10-1000W

    Matcher

    Automatic

    Automatic

    Automatic

    Automatic

    Plasma Excitation

    Capacitive

    Capacitive

    Capacitive

    Capacitive

    Current

    1.2A

    1.2A

    1.2A

    1.2A

    Time Setting

    9999 sec

    9999 sec

    9999 sec

    9999 sec

    Gas Stable Time

    1 min

    1 min

    1 min

    1 min

    Vacuum Degree

    Less than 100pa

    Less than 100pa

    Less than 100pa

    Less than 100pa

    Control System

    7 "PLC touch screen controller

    7 "PLC touch screen controller

    7 "PLC touch screen controller

    7 "PLC touch screen controller

    Gas Control

    2 MFC

    2 MFC

    2 MFC

    2 MFC

    Product Size, mm

    L625xW835 xH805

    L905xW845xH1940

    L625xW600xH2010

    L905xW845xH2010

    Packing Size, mm

    L740xW1010 xH1045

    L1015xW1065xH2050

    L1015xW1065xH2120

    L1015xW1065xH2120

    Pumping speed

    ~30m³/h

    ~30m³/h

    ~48m³/h

    ~48m³/h

    Power Supply

    AC220V 50/60Hz 830W

    AC380V 50/60Hz 830W

    AC380V 50/60Hz 830W

    AC380V 50/60Hz 830W

    Net Weight

    169kg

    465kg

    485kg

    575kg

     

    bio-equip.cn
    CIF is a Chinese manufacturer of plasma cleaners, UV Ozone cleaners, spin coaters. Our factory covers an area of over 4000 square meters. We have obtained a number of patents and have passed GB/ T19001-2016 /ISO9001-2015 quality management system certification, GB/T24001- 2016/ISO14001:2015 environmental management system certification.

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