CIF's spin-coaters possess the advantages of maintaining a stable rotation speed, enabling rapid start-up, ensuring uniform spin-coating, facilitating simple operation, and featuring a compact structure. As such, they provide an optimal solution for laboratory applications.
Working Principle
A spin coater is a thin-film preparation device. On a substrate rotating at high speed, various types of liquid glue are dripped, and under the action of centrifugal force, the liquid glue is evenly coated on the surface of the substrate to form a uniform thin film. It is widely used in microelectronics, semiconductors, new energy, chemical materials, biological materials, optics, silicon wafers, slides, wafers, substrates, ITO conductive glass, and other process plate surface coating.
Function & Features
Precise Drive and Intelligent Control
- Drive System: Features a closed-loop servo motor with digital speed feedback for consistent, accurate rotation, long service life, and reliable repeatability in spin coating.
- Operation Interface: Features a 7-inch full-color touchscreen interface in Chinese and English, enabling intelligent programmable control with real-time display. The standard setup includes 10 gradient steps (with customizable speed and time), and supports up to 20 user-defined programs, each with 10 steps-totaling 100 programmable gradient steps for complex workflows.
High-Efficiency Spin Coating and Adaptive Design
- Uniform Coating Assurance: Integrated internal leveling calibration ensures optimal coating uniformity and enables compatibility with substrates of varying specifications and dimensions.
- Dual-Mode Adaptability: A single system offers dual functionality, allowing users to select between vacuum chuck and non-vacuum chuck modes based on sample characteristics for enhanced process flexibility.
- Ergonomic Design: Equipped with a horizontally oriented sample loading tray that adheres to ergonomic principles, facilitating convenient and efficient sample handling.
Comprehensive Safety Protection System
- Operational Safety Protection: Features an electromagnetic safety interlock that stops rotation when the lid opens, a self-locking lid to prevent accidental opening from sample ejection, and a dual-layer cover with PTFE-coated tempered glass for enhanced protection without the risk of shattered glass or acrylic.
- Fluid Infiltration Resistance: The sample tray and its interface employ a triple-sealing structure to effectively minimize fluid ingress into the motor compartment, thereby enhancing equipment durability.
Durable Structure and Environmental Design
- Corrosion-Resistant Construction: The spin coater housing is made of plastic-coated stainless steel, the process chamber of PTFE, and the sample tray of polypropylene (NPP-H), offering excellent resistance to acids, alkalis, and corrosion for stable performance in harsh conditions.
- Chamber Optimization: Features an upper-lower dual-chamber design: the larger upper chamber simplifies cleaning and residue removal, while the conical lower chamber directs fluid flow and includes a waste collection system for efficient disposal.
- Environmental Cleanliness: Built-in waste fluid management minimizes pollution and ensures a clean, safe workspace.
Expandable Configurations and Broad Compatibility
- Optional Accessories: Offers expandable configurations such as nitrogen purging, nitrogen protection, and automated or manual liquid dispensing, enhancing operational efficiency and adaptability.
- Material Compatibility: Compatible with a wide range of substrates such as silicon wafers, glass, quartz, metals, GaAs, GaN, and InP, demonstrating broad applicability across diverse research and industrial applications.
Technical Specification
|
Model
|
MSC
|
SC1
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SC2
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SC3
|
|
Rotating Speed
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50-10000rpm
|
50-10000rpm
|
50-10000rpm
|
50-10000rpm
|
|
Acceleration
|
0-10000rpm/s
|
0-10000rpm/s
|
0-10000rpm/s
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0-10000rpm/s
|
|
Rotating Stability
|
±1%
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±1%
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±1%
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±1%
|
|
Coating Time
|
0-9999s
|
0-9999s
|
0-9999s
|
0-9999s
|
|
Chamber Diameter, mm
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Dia. 200mm
|
Dia.200mm
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Dia. 200mm
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Dia. 300mm
|
|
Sample Size,
mm
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Circular: Φ≤4”,Square: max. 105x105mm
|
Circular: Φ≤4”,Square: max. 105x105mm
|
Circular: Φ≤6”,
Square: max. 105x105mm
|
Circular: Φ≤8”,
Square: max. 140x140mm
|
|
Product Size, mm
|
L270xW330xH215
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L290xW350xH235
|
L290xW350xH235
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L380xW475xH250
|
|
Packing Size, mm
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L390xW450xH335
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L410xW470xH355
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L410xW470xH355
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L500xW595xH370
|
|
Net Weight
|
7.0 Kg
|
8.9Kg
|
13.0Kg
|
17.0 kg
|
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