1.Working Condition
Power Supply: 220V (+6%/-10%) / 50Hz (+/-1%)
Operation Ambient Temperature: 17~23°C
Working Humidity: < 80% (none condensing)
Noise:< 68dB
2.Application
Mainly applied to the specimen surface appearance analysis.
3.Specification
3.1 Electron Optical:
Electron Gun : hairpin tungsten cathode.
Optical lens: 3 stage electromagnetic lens
Resolution：SE Detector: 4.5nm@30Kv
BSE Detector: 6nm@30Kv.
Accelerating Voltage:0~30Kv(0~10Kv step in 100v,10Kv~30Kv step in 1Kv )
Magnification: Negative amplification:15x ~ 250000x ;
Objective aperture: 2 x 100um,1 x 200um
Analytical working distance:5mm~25mm
3.2 Specimen Stage
Specimen Chamber: 6 ports, adapting multiple accessories and detectors such as EBSD, WDS, EDS, BSE etc.
Specimen Exchange: Draw-out mechanism.(Independent vacuum space)
Scanning method: plane, line, spot, area selected.
Standard Specimen Stage
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EM6200
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Standard(manual)
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(X,Y) Automatic
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(X,Y) Automatic
(Size +)
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X
|
0-50mm
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0-50mm
|
0-80mm
|
|
Y
|
0-50mm
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0-50mm
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0-60mm
|
|
Z
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0-25mm
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0-25mm
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0-50mm
|
|
R
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360°
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360°
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360°
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T
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-5°~90°
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-5°~90°
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-5°~90°
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|
Standard
Specimen
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50 mm
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50 mm
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80 mm
|
|
Max
Specimen
|
100 mm
|
100 mm
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130 mm
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3.3 Vacuum System
Secondary pump system. consist of turbo molecular pump and mechanical pump.
High Vacuum Column Isolation Valve: Allows emission chamber remains at high vacuum during specimen exchange.
4.PC&Operation System
Microsoft® Windows 7 operation system use to manage the SEM software. Image can be saved or printed anytime during the working time.The configuration of PC I5-6500 3.2GHz，3.6GHz Turbo， 6MB HD graphics 530；Memory DDR4 4G；21.5" LED；500G Hard Disk；DELL keyboard and mouse.
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