1. Working conditions:
Power supply:
1.1 230 v (+ / - 6% and 10%) / 50 hz (+ / - 1%).Requires an UPS uninterrupted power supply.
1.2 running time environment temperature: 17-23 ° C
1.3 running time environment: < 80% relative humidity (no condensation)
1.4 noise: < 68 db
1.5 The durability of the instrument operation can run continuously
2. Applications:
Mainly applied to the specimen surface appearance analysis. Equipped with energy spectrum which is used for composition analysis and equipped with a small ion sputtering apparatus to help with sample surface treatment.
3. The Technical Specifications
1) Resolution of Secondary electron image(SE):0.9nm@ 30 Kv; 3nm@1Kv
Back Scattered Electron Image(BSE):2.5nm@30Kv
2). The Magnification: 6X-1000,000 x
3). The Accelerating Voltage:0 ~ 30 Kv(0~10Kv step in 100v,10Kv~30Kv step in 1Kv )
4). Electron Gun:Schottky field emission gun;
Automatic adjustment function: focus, brightness/contrast, astigmatism, dynamic focusing, electron beam on the medium.
5). The tube
High-performance lens system
Aperture of the objective lens: they can be adjusted outside the vacuum chamber and the objective aperture can be replaced without removing lens barrel.
6). Vacuum system
Adsorbed ion compound pump,sputtering ion pump, turbo molecular pump mechanical pump three-stage vacuum system. Automatic vacuum control, vacuum interlock,sample chamber vacuum is not less than7E-4 Pa,electron gun vacuum is not less than 5E-7Pa
7). The Detector
High vacuum secondary electron detector.
adapting multiple accessories and detectors such as EBSD, WDS, EDS, BSE etc.
8).Specimen Stage
Specimen Chamber: 6 ports, adapting multiple accessories and detectors such as EBSD, WDS, EDS, BSE etc.
Specimen Exchange: Draw-out mechanism.(Independent vacuum space)
Standard Specimen Stage
EM8100F
|
(X,Y) Automatic
Standard
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5 Axis Automatic
(Option)
|
X
|
0-80mm
|
0-150mm
|
Y
|
0-80mm
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0-150mm
|
Z
|
0-60mm
|
0-60mm
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R
|
360°
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360°
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T
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-5°~90°
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-5°~75°
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Max Specimen
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110mm
|
150mm
|
Scanning method: plane, line, spot, area selected.
9). The image processor
Maximum 16384 x 16384 pixel display
Image file formats: BMP,GIF,TIF,TIFF,JPG,MNG,ICO CUR,TGA,PCX,JP2,JPC,PGX,RAS,
PNM,SKA,SEM(.SEM).
Automatic recording digital movie: (avi) function
10) The PC and Control (Or Customer Request)
Microsoft® Windows 7 operation system use to manage the SEM software. Image can be saved or printed anytime during the working time.The configuration of PC I5-6500 3.2GHz,3.6GHz Turbo, 6MB HD graphics 530;Memory DDR4 4G;21.5" LED;500G Hard Disk;DELL keyboard and mouse.
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