KYKY-SBC-12 Ion Sputtering Equipment Configuration 
Description:
Ion Sputter Coater for coating non conducting sample.Sample preparation for SEM.
 
Specification:
 Working Chamber Diameter:75-150mm
 
 Suitable Rotary Pump:For Evacuation
 
 Deposition Rate:2-10nm/min
 
 Power:220V/50Hz
 
 Glass processing chamber: ∮100mm; 130mm High.
 Specimen stage size: ∮40mm( Hold 6 specimen cups) 
 Golden target size: ∮58mm*0.12mm(thickness)
 Vacuum detection: Pirani gage
 Vacuum protection:20 pa with microscale inflation valve
 Medium Gas:Argon or air with argon gas special air inlet and gas regulating in microscale.
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