Application:Vacuum Steaming Carbon
Specification:
 Glass protecting shell:∮250mm; 340mm High.
 Glass processing chamber: ∮88mm; 140mm High.
                       ∮88mm; 57mm High.
Specimen stage size: ∮40mm (max)
 Vacuum System:molecula pump and mechanical pump
 Vacuum detection: Pirani gage
 Vacuum:Better than 2 x 10-3 PA
 Vacuum protection:20 pa with microscale inflation valve
 Medium Gas:Argon or air with argon gas special air inlet and gas regulating in microscale.
 Specimen movement: plane rotation,tilt precession
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