- Products
Domestic automatic stylus profiler JS2000B, with high accuracy and high decomposition ability, with one-piece granite structure, provides stable and reliable repeatability measurement.JS2000B provides two color cameras to image the sample and the tip of the needle at the same time, which can observe the sample area without aberration, and it is convenient to locate the feature area, meanwhile, when scanning by the probe, the scanning area can be observed in real time.
- Features
Accurate measurement, rich functionality, all-in-one integration, modular design, convenient after-sales service, excellent cost performance.
- Applications
▲ Thickness measurements such as etching, deposition, and thin films.
▲ Measurement of surface parameters such as roughness and warpage of thin films and polysilicon.
▲ Various types of thin films and other stress measurements
▲ 3D scanning imaging
▲ Scheduled task and multi-point scanning
▲ Batch testing of wafers, batch processing of data, etc.
- System Components
▲ EFEM (SMIF+ROBOT+ALINGER)
▲ JS200B
- Options
▲ Height calibration sample
▲ FFU module
▲ EFEM (SMIF+ROBOT+ALINGER)
▲ E84 Interface
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