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Nissin Ion Implanter Electrostatic Chuck (ESC)
Nissin Ion Implanter Electrostatic Chuck (ESC)
Place of Origin:
Japan
Brand:
Nisshin
Model:
6/8/12 inch
Supplier:
Medica Tec.
Price:
Call or Email：zhangxiang@medicatec.cn
Hits:
704 
Updated:
1/17/2026
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    Items

    Condition

    Specification

     

     

    Leak Current(nA)

    Between Terminals

    @DC±1000V

    < 10

    Between Terminals and Wafer

    @DC1000

    < 10

    Between Terminals and Cooling Plate

    @DC1000

    < 10

    Chucking Force (mN/cm2)

    @DC±1500VDC

    > 30

    Flatness of Surface (μm)

    3D-Measurment

    < 20
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