The Ultraviolet Ozone Cleaner is a cost-effective, efficient, and rapid device designed for the effective removal of organic contaminants from various inorganic substrates such as quartz, silicon, gold, nickel, aluminum, gallium arsenide, alumina and more. 

The UV ozone cleaners launched by CIF utilize a durable UV quartz low pressure mercury vapor grid lamp. To enhance cleaning efficacy, optional features such as height-adjustable sample stage and heating temperature control are available.

Working Principle

High-energy ultraviolet rays with wavelengths of 185nm and 254nm are emitted by ultraviolet lamps in order to effectively eliminate organic molecules (pollutants). The light energy at a wavelength of 185nm can facilitate the decomposition of oxygen (O₂) present in the air into ozone (O₃), while the light energy at a wavelength of 254nm can promote the breakdown of O₃ into O₂ and atomic oxygen (O).

The 254nm ultraviolet light simultaneously excites organic molecules on the surface, enhancing their sensitivity, which can be compromised by ozone molecular clusters. In the continuous photosensitive oxidation reaction, the generated active atomic oxygen (O) reacts with activated organic matter (i.e., hydrocarbon) molecules to produce volatile gases (such as CO₂, CO, H₂O, NO, etc.) that escape from the material's surface. This process effectively eliminates carbon and organic pollutants adhering to the material's surface for efficient cleaning.

Function & Features

Intelligent Operation and Control

• Diverse Control. Offers two interfaces-the basic four-key programmable controller and the advanced 5-inch color touchscreen-to meet varied needs.
• Parameter Management. Enables setting and automatic recording of cleaning parameters, with a digital countdown (1–999 minutes) and support for process interruption.
• Intelligent Compensation. Features automatic light intensity compensation to maintain consistent cleaning performance as the lamp ages.

Precise and Flexible Sample Processing

• Temperature Control. The sample stage supports heating from room temperature to 200°C with 0.1°C accuracy.
• Flexible Placement. Top-mounted stage rotates 360° and adjusts in height for easy sample positioning.

Core Light Source and Reaction System

• High-Performance UV Lamp. Uses high-intensity UV quartz low-pressure mercury lamps (185nm and 254nm); lamp life ≈8,000 hours.
• Usage Monitoring. Tracks and displays lamp usage time with replacement alerts.
• Efficient Reflection. UV reflector extends 25mm beyond the lamp for improved energy utilization.
• Customizable Chamber. Available vacuum chambers in aluminum or quartz per customer requirements.

Safety and Environmental Design

• Dual Safety Protection. Includes safety lock and light status indicator; UV lamp turns off automatically when cover is opened.
• Gas and Ozone Management. Standard inlet/outlet ports allow oxygen connection to boost ozone; optional built-in or external ozone neutralizers remove residual ozone.

Technical Specification

Model	UVO 5/5P/5T	UVO 9/9P/9T	UVO 13/13P/13T
UV Lamp size	130x130mm	230x230mm	330x330mm
Stage height	0-50mm, adjustable	0-50mm, adjustable	0-50mm, adjustable
Power supply	AC220V 50/60Hz 140/190/690W	AC220V 50/60Hz 140/190/690W	AC220V 50/60Hz  140/190/1160W
Product Size	L260xW320xH200mm	L370xW470xH200mm	L465xW575xH200mm
Packing Size	L375xW470xH390mm	L490xW600xH320mm	L575xW680xH320mm
Net Weight	8kg	15kg	18kg

CIF is a Chinese manufacturer of plasma cleaners, UV Ozone cleaners, spin coaters. Our factory covers an area of over 4000 square meters. We have obtained a number of patents and have passed GB/ T19001-2016 /ISO9001-2015 quality management system certification, GB/T24001- 2016/ISO14001:2015 environmental management system certification.