The CPC Series production plasma cleaners by CIF are specifically designed to cater to the needs of both R&D and industrial customers. With their versatile configurations and a vacuum chamber featuring a layered design, the CPC series plasma cleaning machines prove highly adaptable for various production scenarios. These state-of-the-art machines from CIF excel in plasma cleaning, activation, etching, and other applications while demonstrating exceptional stability, performance, repeatability, and uniformity even in challenging environments.

Function & Features

Intelligent control and humanized operation

• Equipped with a 7 - inch color touch - screen, it supports both Chinese and English interfaces, facilitating intuitive interaction.
• It is integrated with an internal PLC industrial control system, which supports both manual and automatic operation modes and enables full - process automated control.
• It can store 20 groups of programmable recipes and supports the storage, output, and full - process traceability of process data, thereby achieving intelligent production management.

Precision Craftsmanship and Gas Control System

• Intelligent Vacuum Control: Enables precise vacuum regulation through two operational modes—adjustment of gas flow rate or chamber pressure-providing flexible and intelligent process control.
• Precise Gas Injection: Uses mass flow controllers for precise delivery of process gases. The system comes standard with a dual-gas configuration, with optional multi-channel configurations available to support a wide range of process gases, including oxygen, argon, nitrogen, carbon tetrafluoride, and hydrogen.
• Uniform Gas Injection Design: Features a multi-channel gas inlet structure that overcomes the uneven distribution of conventional single-channel designs, ensuring consistent and uniform processing effects.
• Contamination Prevention: Integrated with HEPA high-efficiency particulate air filters, along with gas backfill and purge functionalities, to minimize the risk of secondary contamination and maintain a clean processing environment.

Reliable Structure and Wide Adaptability

• The vacuum chamber and pipeline system are made of 316 stainless steel, ensuring cleanliness, corrosion resistance, and process purity.
• The design is compact and space-efficient.
• It handles samples of various materials, shapes, and sizes, offering broad applicability.
• The sample processing is conducted at low temperatures to prevent thermal damage and oxidation.

Stable, efficient, economical and energy-saving

• High processing efficiency and consistent repeatability ensure stable mass production.
• The machine operates stably with low operating costs, minimal maintenance, and less wear.

Comprehensive safety protection

• Features multiple safety mechanisms: automatic power cutoff when the cabin door opens, plus controllable pressure relief and other functions.
• It has a run/stop indicator to ensure operational safety for personnel and samples.

Technical Specification

Model	CPC10	CPC15	CPC27.5	CPC35
Chamber Size	w: 180mm h: 180mm d: 330mm	w: 240mm h: 240mm d: 260mm	w: 250mm h: 250mm d: 440mm	w: 320mm h: 320mm d: 350mm
Chamber Volume	10.7L	15L	27.5L	35L
Chamber Material	stainless steel	stainless steel	stainless steel	stainless steel
Working Area, mm	W180xD280	W240xD210	W250xD390	W320xD300
Electrodes layout	2 layers	2 layers	2 layers	3-4 layers
RF Frequency	13.56MHz	13.56MHz	13.56MHz	13.56MHz
RF Power	10-300W	10-300W	10-300W	10-300W
Matcher	Automatic	Automatic	Automatic	Automatic
Plasma Excitation	Capacitive	Capacitive	Capacitive	Capacitive
Current	1.2A	1.2A	1.2A	1.2A
Time Setting	9999 sec	9999 sec	9999 sec	9999 sec
Gas Stable Time	1 min	1 min	1 min	1 min
Vacuum Degree	Less than 100pa	Less than 100pa	Less than 100pa	Less than 100pa
Control System	7 "PLC touch screen controller	7 "PLC touch screen controller	7 "PLC touch screen controller	7 "PLC touch screen controller
Process Gas	2 MFC	2 MFC	2 MFC	2 MFC
Product Size, mm	L610xW550 xH465	L670xW550 xH525	L850xW560 xH535	L625xW600 xH805
Packing Size, mm	L730xW700 xH720	L790xW775 xH780	L970xW785 xH790	L740xW775 xH1045
Pumping speed	~8m³/h	~8m³/h	~16m³/h	~16m³/h
Power Supply	AC220V 50/60Hz 475W	AC220V 50/60Hz 475W	AC220V 50/60Hz 475W	AC220V 50/60Hz 475W
Net Weight	104kg	109kg	120kg	135kg

 

Model	CPC 60	CPC80	CPC120	CPC150
Chamber Size	w: 320mm h: 320mm d: 585mm	w: 420mm h: 420mm d: 500mm	w: 500mm h: 500mm d: 450mm	w: 500mm h: 500mm d: 600mm
Chamber Volume	60L	80L	120L	150L
Chamber Material	stainless steel	stainless steel	stainless steel	stainless steel
Working Area, mm	W320xD535	W420xD450	W500xD400	W500xD550
Electrodes layout	3-4 layers	6 layers	8-10 layers	10-15 layers
RF Frequency	13.56MHz	13.56MHz	13.56MHz	13.56MHz
RF Power	10-600W	10-600W	10-1000W	10-1000W
Matcher	Automatic	Automatic	Automatic	Automatic
Plasma Excitation	Capacitive	Capacitive	Capacitive	Capacitive
Current	1.2A	1.2A	1.2A	1.2A
Time Setting	9999 sec	9999 sec	9999 sec	9999 sec
Gas Stable Time	1 min	1 min	1 min	1 min
Vacuum Degree	Less than 100pa	Less than 100pa	Less than 100pa	Less than 100pa
Control System	7 "PLC touch screen controller	7 "PLC touch screen controller	7 "PLC touch screen controller	7 "PLC touch screen controller
Gas Control	2 MFC	2 MFC	2 MFC	2 MFC
Product Size, mm	L625xW835 xH805	L905xW845xH1940	L625xW600xH2010	L905xW845xH2010
Packing Size, mm	L740xW1010 xH1045	L1015xW1065xH2050	L1015xW1065xH2120	L1015xW1065xH2120
Pumping speed	~30m³/h	~30m³/h	~48m³/h	~48m³/h
Power Supply	AC220V 50/60Hz 830W	AC380V 50/60Hz 830W	AC380V 50/60Hz 830W	AC380V 50/60Hz 830W
Net Weight	169kg	465kg	485kg	575kg

 

CIF is a Chinese manufacturer of plasma cleaners, UV Ozone cleaners, spin coaters. Our factory covers an area of over 4000 square meters. We have obtained a number of patents and have passed GB/ T19001-2016 /ISO9001-2015 quality management system certification, GB/T24001- 2016/ISO14001:2015 environmental management system certification.