Applications

Plasma cleaners are widely used in materials science, microelectronics, semiconductors, circuit boards, LEDs, microfluidics, photoelectric solar energy and other fields for the purposes of material surface cleaning, activation, modification and etching.

Function & Features

• Intelligent interactive interface: Featuring a 7-inch color touchscreen, the system supports bilingual operation in Chinese and English. It enables real-time monitoring and automatic adjustment of process parameters. With 20 pre-programmed recipes, the system allows for efficient storage and traceability of process data.
• Reliable control system: It adopts PLC for full-process control and supports both manual and automatic operation modes to ensure a stable and reliable cleaning process.
• Bidirectional intelligent vacuum control: The system can precisely control the vacuum degree through two modes of adjusting gas flow or chamber pressure, providing more flexible and intelligent process control to meet diverse precision processing requirements.
• Precise gas management: Equipped with gas float flowmeters or mass flowmeters, it supports various gas sources such as oxygen, argon, nitrogen, hydrogen and mixed gases, with high control accuracy.
• Clean and anti-pollution design: Equipped with gas backfill and purge function, and fitted with HEPA high-efficiency filters to effectively prevent secondary pollution.
• High-quality material structure: The vacuum chamber can be made of 316 stainless steel or quartz, and the entire vacuum pipeline system is made of 316 stainless steel, which is corrosion-resistant and pollution-free.
• Humanized operation design: The operation panel is designed at a 60° angle, which conforms to ergonomics, with a friendly interface and convenient operation; the upper control and lower cabin structure is compact, saving space; the front panel is concave, protecting the flowmeter and cabin door from damage.
• Highly efficient and stable process: The treatment process is fast, uniform, and repeatable, with no pollution; the sample processing temperature is low, avoiding thermal damage and thermal oxidation.
• Comprehensive safety protection: The power is automatically cut off when the door is opened, and it is equipped with multiple protection mechanisms such as controllable pressure relief to ensure the safety of operation and samples.

Technical Specification

Model	CPC-F	CPC-F Plus	CPC-FM	CPC-FM plus
RF Frequency	40KHz	13.56MHz	40KHz	13.56MHz
RF Power	10-300W	10-150W	10-300W	10-150W
Matcher	Auto match	Auto match	Auto match	Auto match
Plasma Excitation	Capacitive or inductive coupling (ICP)	Capacitive or inductive coupling (ICP)	Capacitive or inductive coupling (ICP)	Capacitive or inductive coupling (ICP)
Gas Control	Dual float flowmeters	Dual float flowmeters	Dual MFC	Dual MFC
Chamber Size	D250xΦ160mm	D250xΦ160mm	D250xΦ160mm	D250xΦ160mm
Chamber Material	Stainless steel or quartz	Stainless steel or quartz	Quartz	Quartz
Chamber Volume	5L	5L	5L	5L
Working Area	L250xW160mm	L250xW160mm	L250xW160mm	L250xW160mm
Time Setting	9999 sec	9999 sec	9999 sec	9999 sec
Vacuum Pump performance	4m³/h	4m³/h	4m³/h	4m³/h
Gas Stable Time	1 min	1 min	1 min	1 min
Vacuum Degree	Less than 100pa	Less than 100pa	Less than 100pa	Less than 100pa
Power Supply	AC220V 50/60Hz 420/310W	AC220V 50/60Hz 420/310W	AC220V 50/60Hz 420/320W	AC220V 50/60Hz 420/320W
Product Size	L440xW410xH455mm	L440xW410xH455mm	L440xW410xH455mm	L440xW410xH455mm
Packing Size	L580xW580xH695mm	L580xW580xH695mm	L580xW580xH695mm	L580xW580xH695mm
Net Weight	32kg	32kg	32kg	32kg

 

CIF is a Chinese manufacturer of plasma cleaners, UV Ozone cleaners, spin coaters. Our factory covers an area of over 4000 square meters. We have obtained a number of patents and have passed GB/ T19001-2016 /ISO9001-2015 quality management system certification, GB/T24001- 2016/ISO14001:2015 environmental management system certification.