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Dual Chiller
Dual Chiller
Origin of place China
Model TX-2020
Supplier PHST Corporation
Price Call:18068280519 or Email:info@phstc.com
Hits 1836
Updated 12/1/2020
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 【Characteristic】


●Dual channel
●Low temperature to -20℃
●Magnetic coupling pump, none leakage
●Non-CFC Refrigerant 
●Central Monitoring System available(CMS)
●For 200mm,300mm(LAM, AMAT)use; All main tool communication protocol

【Specifications】

TYPE TX-2020A (Channel-1,Channel-2)

Temperature Range
Temperature accuracy
Coolant

-20℃~+80℃
±0.1℃(@No-load change)
Novec; Galden; DI/EG
Pump
Pump performance
1.5Kw Magnetically coupled pump
20 Litter/Min @0.4Mpa(-10 deg.C/ HT-135)
Compressor cooling capacity
Refrigerant 
Facility water
ch1:3kw @10℃; ch2:6kw@10℃
HFC
40L/min @+25℃
Heater 4Kw
Interface Lam, AMAT
Dimension 660(W)×960(D)×1600mm(H)
Wight 250Kg
Power 3-phase AC208V(380V)


【Cooling capacity curve / pump performance curve】

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