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Nissin Ion Implanter Electrostatic Chuck (ESC)
Nissin Ion Implanter Electrostatic Chuck (ESC)
Origin of place Japan
Model 6/8/12 inch
Supplier Medica Tec.
Price Call or Email:zhangxiang@medicatec.cn
Hits 726
Updated 1/29/2026
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Items

Condition

Specification

 

 

Leak Current(nA)

Between Terminals

@DC±1000V

< 10

Between Terminals and Wafer

@DC1000

< 10

Between Terminals and Cooling Plate

@DC1000

< 10

Chucking Force (mN/cm2)

@DC±1500VDC

> 30

Flatness of Surface (μm)

3D-Measurment

< 20

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