The 7500cs is a high sensitivity reaction cell ICP-MS designed specifically to meet semiconductor industry demands for high performance, reliability and sensitivity in trace metal analysis. The 7500cs builds on the success of previous Agilent ICP-MS systems and sets a new performance benchmark in the development of the technique.

Agilent’s exclusive Octopole Reaction System (ORS) opens new analytical possibilities for ICP-MS in the semiconductor laboratory in interference removal, while maintaining similar sensitivity to the 7500s* in non-gas mode. The ORS features an on-axis reaction cell, which is effective against challenging spectral interferences in a wide range of semiconductor matrices such as:


Removal of phosphorus and sulfur based interferences on Ti, Cu and Zn in phosphoric and sulfuric acid
Low level detection in challenging semiconductor matrices such as photoresist, VPD extracts (high silicon matrix)
Unsurpassed detection capability in the ultraclean reagents such as hydrogen peroxide, nitric acid, and deionized water.
* 7500cs configuration is available as an upgrade to 7500s

Features

Novel extraction lens design which reduces Easily Ionized Elements (EIE) BECs close to cool plasma levels, even at 1600W forward power
Second-generation ORS that consists of an octopole ion guide, mounted on-axis with the quadrupole for higher ion transmission.
The ORS employs simple reaction gases (hydrogen and helium) so side reactions that would create new, unpredictable interferences are eliminated.
All measurements are made directly on the analyte mass giving more reliable results.

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